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Grant Award View - GA215204
Facility for enabling low thermal budget Si/SiGe technologies
GA ID:
GA215204
Agency:
Australian Research Council
Approval Date:
21-Jan-2022
Publish Date:
25-Jan-2022
Category:
Science, Technology, Engineering and Mathematics (STEM) Research
Grant Term:
10-Oct-2022 to 9-Oct-2024
Original: 21-Jan-2022 to 31-Dec-2022
Value (AUD):
$580,000.00
(GST inclusive where applicable)
Variations:
- GA215204-V2 - Variation to Grant (17-Jan-2024 )
- GA215204-V1 - Variation to Grant (6-Jul-2023 )
One-off/Ad hoc:
No
Aggregate Grant Award:
No
PBS Program Name:
ARC 21/22 Linkage
Grant Program:
Linkage Infrastructure, Equipment and Facilities
Grant Activity:
Facility for enabling low thermal budget Si/SiGe technologies
Purpose:
This project aims to enhance Australian micro/nano fabrication capability and strengthen research across a range of key technologies by establishing an advanced state-of-the art semiconductor facility that enables deposition of wide range of silicon-based films at low thermal budget. The facility is expected to provide unique capabilities that are not currently available in Australia. The expected outcomes include: (i) development of 3D integration approaches on CMOS Integrated Circuit that will be necessary for the rapidly growing applications in Artificial Intelligence, Internet-of-Things, and Wearables; (ii) thick electrically active silicon-based films for Biomedical, Telecommunication, Photonics, and Micro Electro Mechanical Systems.
GO ID:
GO Title:
Linkage Infrastructure, Equipment and Facilities for funding commencing in 2022
Internal Reference ID:
LE22 Round 1
Selection Process:
Targeted or Restricted Competitive
Confidentiality - Contract:
No
Confidentiality - Outputs:
No
Grant Recipient Details
Recipient Name:
The University of New South Wales
Recipient ABN:
57 195 873 179
Grant Recipient Location
Suburb:
KENSINGTON
Town/City:
KENSINGTON
Postcode:
2033
State/Territory:
NSW
Country:
AUSTRALIA
Grant Delivery Location
State/Territory:
NSW
Postcode:
2033
Country:
AUSTRALIA