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Grant Award View - GA188769-V3
Nonlinear Optical Metrology of Electronic Interfaces for Silicon Devices
GA ID:
GA188769-V3
Agency:
Australian Research Council
Approval Date:
13-Sep-2021
Variation Publish Date:
26-Aug-2022
Variation Date:
16-Aug-2022
Category:
Science, Technology, Engineering and Mathematics (STEM) Research
Grant Term:
26-May-2022 to 25-May-2025
Value (AUD):
$417,398.00
(GST inclusive where applicable)
Varies:
GA188769
- Nonlinear Optical Metrology of Electronic Interfaces for Silicon Devices
One-off/Ad hoc:
No
Aggregate Grant Award:
No
PBS Program Name:
ARC 21/22 Linkage
Grant Program:
Linkage Projects
Grant Activity:
Nonlinear Optical Metrology of Electronic Interfaces for Silicon Devices
Purpose:
This project aims to develop a prototype electric field induced second harmonic generation metrology setup for studying thin film dielectric interfaces on silicon in partnership with Femtometrix. The quality of these silicon-dielectric interfaces, which are affected by trapped charges and defects, are critical for microelectronic and optoelectronic device manufacturing. Through several proposed methodologies to separate the effect of interface and bulk signals, it is expected that the sensitivity of the prototype setup will exceed the previous record of 1 kV/cm. This metrology technique will be further expanded for applicability to silicon photovoltaics, specifically passivating contacts which cannot be studied via conventional techniques.
GO ID:
GO Title:
Linkage Projects for funding applied for in 2020
Internal Reference ID:
LP20 Round 3
Selection Process:
Targeted or Restricted Competitive
Confidentiality - Contract:
No
Confidentiality - Outputs:
No
Grant Recipient Details
Recipient Name:
The University of New South Wales
Recipient ABN:
57 195 873 179
Grant Recipient Location
Suburb:
KENSINGTON
Town/City:
KENSINGTON
Postcode:
2033
State/Territory:
NSW
Country:
AUSTRALIA
Grant Delivery Location
State/Territory:
NSW
Postcode:
2033
Country:
AUSTRALIA